An ultra-low specific on-resistance double-gate trench SOI LDMOS with P/N pillars. (December 2017)

• Record Type: Journal Article
• Authors: Yang, Dong; Hu, Shengdong; Lei, Jianmei; Huang, Ye; Yuan, Qi; Jiang, Yuyu; Guo, Jingwei; Cheng, Kun; Lin, Zhi; Zhou, Xichuan; Tang, Fang
• Is Part Of: Superlattices and microstructures. Volume 112(2017)
• Page Start: 269
• Page End: 278
• Publication Date: 2017-12
• Subjects: LDMOS -- Trench -- Pillar -- Breakdown voltage (BV) -- Specific on-resistance; Superlattices as materials -- Periodicals; Microstructure -- Periodicals; Semiconductors -- Periodicals; Superréseaux -- Périodiques; Microstructure (Physique) -- Périodiques; Semiconducteurs -- Périodiques; 621.38152
• DOI: 10.1016/j.spmi.2017.09.033
• Languages: English
• ISSNs: 0749-6036

Abstract

Abstract: A novel ultra-low specific on-resistance ( R on, sp ) trench lateral double-diffused MOSFET with P/N pillars and dual trench gates (P/N DTG-T LDMOS) based on silicon-on-insulator technology is proposed in this paper. The new structure features dual trench gates and heavily doping P/N pillars. The P/N pillars are inserted into the drift region under the P-well. The P-pillar causes an assistant depletion effect on the drift region. The N-pillar can not only improve the breakdown voltage (BV) by modulating the electric field but also significantly reduce the R on, sp by increasing the doping concentration of the drift region. Furthermore, the dual trench gates form dual conduction channels and the heavily doping N-pillar provides a lower resistance region for the carriers, which can both reduce the R on, sp . Consequently, compared with the conventional trench LDMOS, a lower R on, sp of 0.58 mΩ cm 2 and a higher the figure of merit (FOM, FOM=BV 2 / R on, sp ) of 62.9 MW/cm 2 are obtained for the P/N DTG-T LDMOS, which are improved by 74.8% and 308.4% respectively. Meanwhile, the BVs of the both structures are maintained at a same level of 190 V. Highlights: An ultra-low specific on-resistance double-gate trench SOI LDMOS is proposed. The influences of structure parameters on the performances are investigated. A R on, sp of 0.58 mΩ cm 2 and a figure-of-merit of 62.9 MW/cm 2 are obtained. Figure-of-merit of the proposed structure is enhanced by 308.4%. A significantly optimized dependence of R on, sp on BV is obtained.