Cite
MLA Citation
Jia Zhao et al.. “Aging effect of AlF3 coatings for 193 nm lithography.” Optics & laser technology, vol. 99, 2018, pp. 310–314. http://access.bl.uk/ark:/81055/vdc_100050625605.0x00005b
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Jia Zhao et al.. “Aging effect of AlF3 coatings for 193 nm lithography.” Optics & laser technology, vol. 99, 2018, pp. 310–314. http://access.bl.uk/ark:/81055/vdc_100050625605.0x00005b