Optical characterization and thermal properties of CVD diamond films for integration with power electronics. (October 2017)

• Record Type: Journal Article
• Authors: Nazari, Mohammad; Hancock, B. Logan; Anderson, Jonathan; Hobart, Karl D.; Feygelson, Tatyana I.; Tadjer, Marko J.; Pate, Bradford B.; Anderson, Travis J.; Piner, Edwin L.; Holtz, Mark W.
• Is Part Of: Solid-state electronics. Volume 136(2017)
• Page Start: 12
• Page End: 17
• Publication Date: 2017-10
• Subjects: Spectroscopic ellipsometry -- Micro-Raman -- CVD diamond -- Thermal management; Semiconductors -- Periodicals; Semiconducteurs -- Périodiques; 621.38152
• DOI: 10.1016/j.sse.2017.06.025
• Languages: English
• ISSNs: 0038-1101

Abstract

Highlights: Diamond material properties studied for thermal management applications. Thickness of the diamond is mapped using spectroscopic ellipsometry. Silicon carbide interlayer observed and confirmed by transmission electron microscopy. Thermal conductivity is determined based on micro-Raman mapping. Abstract: Studies of diamond material for thermal management are reported for a nominally 1-µm thick layer grown on silicon. Thickness of the diamond is measured using spectroscopic ellipsometry. Spectra are consistently modeled using a diamond layer taking into account surface roughness and requiring an interlayer of nominally silicon carbide. The presence of the interlayer is confirmed by transmission electron microscopy. Thermal conductivity is determined based on a heater which is microfabricated followed by back etching to produce a supported diamond membrane. Micro-Raman mapping of the diamond phonon is used to estimate temperature rise under known drive conditions of the resistive heater. Consistent values are obtained for thermal conductivity based on straightforward analytical calculation using phonon shift to estimate temperature and finite element simulations which take both temperature rise and thermal stress into account.