Cite
MLA Citation
Taku Sugimoto et al.. “Change in Slurry/Glass Interfacial Resistance by Chemical Mechanical Polishing.” MRS advances, vol. 2, 2017, pp. 2205–2210. http://access.bl.uk/ark:/81055/vdc_100048041894.0x00000c
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Taku Sugimoto et al.. “Change in Slurry/Glass Interfacial Resistance by Chemical Mechanical Polishing.” MRS advances, vol. 2, 2017, pp. 2205–2210. http://access.bl.uk/ark:/81055/vdc_100048041894.0x00000c