Composition and optical property controlled in In2O3/W2N nanostructure composites by nitrogen plasma assisted in-situ thermal annealing. (September 2017)

• Record Type: Journal Article
• Authors: Saroni, Azianty; Alizadeh, Mahdi; Rahman, Saadah Abdul; Dee, Chang Fu; Goh, Boon Tong
• Is Part Of: Materials science in semiconductor processing. Volume 68(2017)
• Page Start: 6
• Page End: 14
• Publication Date: 2017-09
• Subjects: Nanostructure composite -- W2N -- Evaporation -- Nitrogen ion bombardment -- Optical energy gap; Semiconductors -- Periodicals; Integrated circuits -- Materials -- Periodicals; Semiconducteurs -- Périodiques; Circuits intégrés -- Matériaux -- Périodiques; Electronic journals; 621.38152
• DOI: 10.1016/j.mssp.2017.05.030
• Languages: English
• ISSNs: 1369-8001

Abstract

Abstract: In2 O3 /W2 N nanostructure composites were grown by nitrogen plasma assisted in-situ thermal annealing at different hot-filament temperatures, T f . The in-situ thermal annealing changes the as-grown In2 O3 nanostructure to In2 O3 /W2 N nanostructure composite with decreasing the grain size from 200 to 300 nm to ~ 100 nm. The optical spectroscopy results indicate that the optical energy gap of the nanostructure composites (3.7–2.7 eV) can be effectively tailored by monotonically increasing the W2 N incorporation. The formation of W2 N is attributed to the high energetic ion bombardment of N adatoms and incorporation of W adatoms. Furthermore, the effects of the filament temperature, T f on the compositions in relation with the optical properties of the nanostructure composite are discussed.