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APA Citation
Longo, P., Zhang, H., & Twesten, R. (2017). simultaneous DualEELS and EDS analysis across the ohmic contact region in 3D NAND storage and FinFET electronic devices. Materials science in semiconductor processing, 65, 44–48. http://access.bl.uk/ark:/81055/vdc_100046877657.0x00002a