Cite
HARVARD Citation
Longo, P. et al. (2017). Simultaneous DualEELS and EDS analysis across the ohmic contact region in 3D NAND storage and FinFET electronic devices. Materials science in semiconductor processing. pp. 44-48. [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Longo, P. et al. (2017). Simultaneous DualEELS and EDS analysis across the ohmic contact region in 3D NAND storage and FinFET electronic devices. Materials science in semiconductor processing. pp. 44-48. [Online].