Cite
MLA Citation
Hyun Chan Park et al.. “76‐1: Invited Paper: Optimization of Applied Materials PiVotTM Array Coater for Metal Oxide Semiconductor Layers.” Digest of technical papers, vol. 48, no. 1, 2017, pp. 1108–1111. http://access.bl.uk/ark:/81055/vdc_100046624911.0x000019