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APA Citation
Kim, J. D., Mohseni, P. K., Balasundaram, K., Ranganathan, S., Pachamuthu, J., Coleman, J. J., & Li, X. (2017). scaling the Aspect Ratio of Nanoscale Closely Packed Silicon Vias by MacEtch: Kinetics of Carrier Generation and Mass Transport. Advanced functional materials, 27, n/a. http://access.bl.uk/ark:/81055/vdc_100044491145.0x00001a