A new low specific on-resistance Hk-LDMOS with N-poly diode. (January 2017)
- Record Type:
- Journal Article
- Title:
- A new low specific on-resistance Hk-LDMOS with N-poly diode. (January 2017)
- Main Title:
- A new low specific on-resistance Hk-LDMOS with N-poly diode
- Authors:
- Deng, Jing
Huang, Mingmin
Cheng, Junji
Lyu, Xinjiang
Chen, Xingbi - Abstract:
- Abstract: A new structure of the laterally diffused metal–oxide–semiconductor transistors (LDMOS) using a high permittivity (H k ) dielectric is proposed, and its mechanism is investigated by 2-D TCAD simulation. The breakdown voltage ( BV ) is remarkably increased by using the H k dielectric. Moreover, a reverse biased poly diode is first introduced on the H k dielectric, which assists the n-drift region forming an electron accumulation layer to reduce the specific on-resistance ( R on, sp ) further. Compared with a conventional LDMOS with the same geometry, the BV increases by 24%, and the R on, sp decreases approximately by 50%. Besides, the proposed structure is less sensitive to the n-drift region doping deviation, and exhibits a larger safe operating area (SOA). Highlights: A 700 V LDMOS structure using a high permittivity (H k ) dielectric is proposed. The breakdown voltage is remarkably increased by using the H k dielectric. An electron accumulation layer is formed at the surface of the drift region.
- Is Part Of:
- Superlattices and microstructures. Volume 101(2017)
- Journal:
- Superlattices and microstructures
- Issue:
- Volume 101(2017)
- Issue Display:
- Volume 101, Issue 2017 (2017)
- Year:
- 2017
- Volume:
- 101
- Issue:
- 2017
- Issue Sort Value:
- 2017-0101-2017-0000
- Page Start:
- 180
- Page End:
- 190
- Publication Date:
- 2017-01
- Subjects:
- LDMOS -- High-k (Hk) -- Electron accumulation layer -- Breakdown voltage (BV) -- Specific on-resistance (Ron, sp)
Superlattices as materials -- Periodicals
Microstructure -- Periodicals
Semiconductors -- Periodicals
Superréseaux -- Périodiques
Microstructure (Physique) -- Périodiques
Semiconducteurs -- Périodiques
621.38152 - Journal URLs:
- http://www.sciencedirect.com/science/journal/07496036 ↗
http://www.elsevier.com/journals ↗ - DOI:
- 10.1016/j.spmi.2016.11.049 ↗
- Languages:
- English
- ISSNs:
- 0749-6036
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8547.076700
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 2267.xml