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APA Citation
Joyce, R., Yadav, S., Sharma, A. K., Panwar, D. K., Bhatia, R. R., Varghese, S., & Akhtar, J. (n.d.). pattern transfer of microstructures between deeply etched surface for MEMS applications. Materials science in semiconductor processing, 56, 373–380. http://access.bl.uk/ark:/81055/vdc_100038845884.0x00000c