Cite

    Zhang, L., de Marneffe, J., Leroy, F., Lefaucheux, P., Tillocher, T., Dussart, R., Maekawa, K., Yatsuda, K., Dussarrat, C., Goodyear, A., Cooke, M., De Gendt, S., & Baklanov, M. R. (2016). mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation. Journal of physics, 49, . http://access.bl.uk/ark:/81055/vdc_100036320264.0x000062