Cite
HARVARD Citation
Zhang, L. et al. (2016). Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation. Journal of physics. p. . [Online].
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Zhang, L. et al. (2016). Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation. Journal of physics. p. . [Online].