Cite
HARVARD Citation
Yu, D. et al. (2016). The variation of the leakage current characteristics of W/Ta2O5/W MIM capacitors with the thickness of the bottom W electrode. Microelectronics and reliability. pp. 95-98. [Online].
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Yu, D. et al. (2016). The variation of the leakage current characteristics of W/Ta2O5/W MIM capacitors with the thickness of the bottom W electrode. Microelectronics and reliability. pp. 95-98. [Online].