Alteration of titanium dioxide material properties by glancing angle deposition plus annealing treatment. (February 2016)

• Record Type: Journal Article
• Authors: Wang, Bin; Qi, Hongji; Chai, Yingjie; Li, Meng; Guo, Meng; Pan, Mingyan; Wang, Hu; Cui, Yun; Shao, Jianda
• Is Part Of: Superlattices and microstructures. Volume 90(2016)
• Page Start: 87
• Page End: 95
• Publication Date: 2016-02
• Subjects: Nanomaterials -- Semiconductor materials -- Materials and process characterization; Superlattices as materials -- Periodicals; Microstructure -- Periodicals; Semiconductors -- Periodicals; Superréseaux -- Périodiques; Microstructure (Physique) -- Périodiques; Semiconducteurs -- Périodiques; 621.38152
• DOI: 10.1016/j.spmi.2015.12.007
• Languages: English
• ISSNs: 0749-6036

Abstract

Abstract: Titanium dioxide (TiO2 ) nanostructured thin film (TNF), as an important semiconductor exhibiting large surface-to-volume ratio and unique property, has attracted more and more researches. As an important versatile nanofabrication technique, the glancing angle deposition technique (GLAD) is used to fabricate the TNF, frequently. However, little is known about the influence of GLAD on microstructure, crystalline structure, Ti/O chemical state and photoluminescence (PL) properties of TiO2 thin films. In this paper, pure anatase TNF and traditional TiO2 thin film (TTF) were deposited by combining GLAD system with the annealing treatment. All of the prepared TNFs keep discrete nanoscale columnar structures characterized by SEM. The evolution of morphology, crystallization structure, Ti/O chemical state and PL properties of TNFs and TTFs under annealing treatment have been investigated in detail. Simultaneously, comparing with TTFs, the influence of GLAD on TNFs material properties has been analyzed further. With the optimum annealing temperature (400 °C), one can obtain fine nanostructures and pure anatase precipitation of TNFs. The GLAD technique can adjust the preferred crystal orientation of TiO2 thin films, which can be used as a method of material structural design. Both TNFs and TTFs exhibit broad band (380–700 nm) photoluminescence. Nevertheless, the TNFs exhibit much weaker and smoother PL spectra than that of TTFs, due to the large surface-to-volume ratio. The results indicate the potential good catalytic applications of TNFs deposited by GLAD. Highlights: TNFs and TTFs are successfully fabricated by glancing angle deposition (GLAD). Comparing with TTFs, regulation effects of GLAD plus annealing have been discussed. The optimum thermal treatment temperature for TNF is about 400 °C. The crystallized status of TNFis quite different from that of TTF.