E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices. (February 2016)

Record Type:: Journal Article
Title:: E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices. (February 2016)
Main Title:: E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices
Authors:: Napolitani, Enrico
Duffy, Ray
Zographos, Nikolas
van Dal, Mark
Abstract:
Is Part Of:: Materials science in semiconductor processing. Volume 42:Part 2(2016:Feb.)
Journal:: Materials science in semiconductor processing
Issue:: Volume 42:Part 2(2016:Feb.)
Issue Display:: Volume 42, Part 2 (2016)
Year:: 2016
Volume:: 42
Part:: 2
Issue Sort Value:: 2016-0042-0000-0002
Page Start:: 165
Page End:
Publication Date:: 2016-02
Subjects:: Semiconductors -- Periodicals
Integrated circuits -- Materials -- Periodicals
Semiconducteurs -- Périodiques
Circuits intégrés -- Matériaux -- Périodiques
Electronic journals
621.38152
Journal URLs:: http://www.sciencedirect.com/science/journal/latest/13698001 ↗
http://www.elsevier.com/journals ↗
DOI:: 10.1016/j.mssp.2015.11.019 ↗
Languages:: English
ISSNs:: 1369-8001
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - 5396.440600
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store
Ingest File:: 984.xml