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APA Citation
Tang, J., Liu, Y., Sun, M., Fan, S., & Li, Y. (n.d.). benzotriazole removal on post-Cu CMP cleaning*Project supported by the Major National Science and Technology Special Projects (No. 2009ZX02308).. Journal of semiconductors, 36, 1825–. http://access.bl.uk/ark:/81055/vdc_100025935320.0x00004d