Cite
MLA Citation
British Standards Institution,. BS ISO 17109 AMD1. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films.. London : British Standards Institution, 2021. http://access.bl.uk/ark:/81055/vdc_100119255495.0x000001