Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /: fabrication of next-generation nanodevices. (2019)

Record Type:
Book
Title:
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /: fabrication of next-generation nanodevices. (2019)
Main Title:
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
Further Information:
Note: Ungyu Paik, Jea-Gun Park.
Other Names:
Paik, Ungyu
Park, Jea-Gun
Publisher Details:
Place of publication not identified : CRC Press
Publication Date:
2019
Extent:
1 online resource (221 pages), (186 illustrations)
Subjects:
621.38152
Chemical mechanical planarization
Nanoparticles
Nanoelectronics
Languages:
English
ISBNs:
9781000023367
1000023362
Access Rights:
Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:
Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:
British Library HMNTS - ELD.DS.421624
Ingest File:
02_530.xml