Three-Dimensional Integration of Semiconductors : Processing, Materials, and Applications /: Processing, Materials, and Applications. (2015)

• Record Type: Book
• Further Information: Note: Edited by Kazuo Kondo, Morihiro Kada, Kenji Takahashi.
• Editors: Kondō, Kazuo; Kada, Morihiro; Takahashi, Kenji
• Other Names: Kondō, Kazuo
• Contents: Research and Development History of Three Dimensional (3D) Integration Technology -- Recent Research and Development Activities of Three Dimensional (3D) Integration Technology -- TSV Processes -- Wafer and Die Bonding Processes -- Metrology and Inspection -- TSV Characteristics and Reliability: Impact of 3D Integration Processes on Device Reliability -- Trends in 3D Integrated Circuit (3D-IC) Testing Technology -- Dream Chip Project at ASET.
• Publisher Details: Cham : Springer
• Publication Date: 2015
• Extent: 1 online resource (423 pages)
• Subjects: 621.38152; Chemistry; Electrochemistry; Mechanical engineering; Electrical engineering; Biomedical engineering; Chemistry; Electrochemistry; Electrical Engineering; Semiconductors; Mechanical Engineering; Biomedical Engineering; Semiconductors -- Materials; Semiconductors; Biomedical engineering; Chemistry; Electrical engineering; Electrochemistry; Mechanical engineering; Semiconductors; Technology & Engineering -- Electrical; Technology & Engineering -- Electronics -- Semiconductors; Technology & Engineering -- Mechanical; Technology & Engineering -- Engineering (General); Electrical engineering; Semi-conductors & super-conductors; Mechanical engineering; Biomedical engineering; Computer engineering; Science -- Chemistry -- Physical & Theoretical; Electrochemistry & magnetochemistry; Electronic books
• Languages: English
• ISBNs: 3319186752; 9783319186757; 9783319186740; 3319186744
• Notes: Note: Includes bibliographical references at the end of each chapters and index.; Note: Description based on online resource; title from PDF title page (ebrary, viewed August 24, 2016).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.