Handbook of thin film technology. (2015)

• Record Type: Book
• Further Information: Note: Hartmut Frey, H.R. Khan, editors.
• Editors: Frey, Hartmut; Khan, H. R
• Contents: Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.
• Publisher Details: Berlin : Springer
• Publication Date: 2015
• Extent: 1 online resource
• Subjects: 621.38152; Materials science; Thin films -- Handbooks, manuals, etc; Thin films; TECHNOLOGY & ENGINEERING / Mechanical; Technology & Engineering -- Material Science; Technology & Engineering -- Nanotechnology & MEMS; Science -- Chemistry -- Physical & Theoretical; Testing of materials; Nanotechnology; Tribology (friction & lubrication); Physical chemistry; Electronic devices & materials; Surfaces (Physics); Nanotechnology; Chemistry, inorganic; Chemistry, Physical organic; Optical materials; Materials science; Handbooks and manuals; Electronic books
• Languages: English
• ISBNs: 9783642054303; 3642054307
• Related ISBNs: 9783642054297; 3642054293
• Notes: Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.