Handbook of semiconductor manufacturing technology. (2017)

• Record Type: Book
• Further Information: Note: Edited by Robert Doering, Yoshio Nishi.
• Other Names: Doering, Robert, 1946-; Nishi, Yoshio, 1940-
• Edition: 2nd ed
• Publisher Details: Place of publication not identified : CRC Press
• Publication Date: 2017
• Extent: 1 online resource (1720 pages), (227 illustrations)
• Subjects: 621.38152; Semiconductors -- Design and construction -- Handbooks, manuals, etc; Semiconductor industry -- Handbooks, manuals, etc
• Languages: English
• ISBNs: 9781351829823; 1351829823
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.