High-K gate dielectrics. (©2004)

• Record Type: Book
• Further Information: Note: Edited by Michel Houssa.
• Other Names: Houssa, Michel
• Contents: Front Cover; Contents; Foreword; 1.1 High-k gate dielectrics: why do we need them?; 2.1 Atomic layer deposition; 2.2 Chemical vapour deposition; 2.3 Pulsed laser deposition of dielectrics; 3.1 Oxygen diffusion; 3.2 Defects in stacks of Si with nanometre thick high-k dielectric layers: characterization and identification by electron spin resonance; 3.3 Band alignment at the interfaces of Si and metals with high-permittivity insulating oxides; 3.4 Electrical characterization, modelling and simulation of MOS structures with high-k gate stacks. 4.1 Defects and defect-controlled behaviour in high-k materials: a theoretical perspective4.2 Chemical bonding and electronic structure of high-k transition metal dielectrics: applications to interfacial band offset energies and electronically active defects; 4.3 Electronic structure and band offsets of high-dielectric-constant gate oxides; 4.4 Reduction of the electron mobility in high-k MOS systems caused by remote scattering with soft interfacial optical phonons; 4.5 Ab initio calculations of the structural, electronic and dynamical properties of high-k dielectrics. 4.6 Defect generation under electrical stress: experimental characterization and modelling5.1 Device integration issues; 5.2 Device architectures for the nano-CMOS era; 5.3 High-k transistor characteristics; Back Cover.
• Publisher Details: Bristol Philadelphia : Institute of Physics
• Publication Date: 2004
• Copyright Date: 2004
• Extent: 1 online resource (xi, 601 pages), illustrations
• Subjects: 621.38152; Gate array circuits -- Materials; Metal oxide semiconductors -- Materials; Metal oxide semiconductors, Complementary -- Materials; Dielectrics -- Research; Dielectric devices; Dielectric devices; Dielectrics -- Research; Gate array circuits -- Materials; Metal oxide semiconductors -- Materials; Metal oxide semiconductors, Complementary -- Materials; TECHNOLOGY & ENGINEERING -- Electronics -- Solid State; TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors; Electronic books
• Languages: English
• ISBNs: 9781420034141; 1420034146
• Related ISBNs: 0750309067; 9780750309066
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.