Cite
HARVARD Citation
Unknown (2012) Fundamentals of microfabrication and nanotechnology.. [Online]. Boca Raton, FL : CRC Press. Available from: http://access.bl.uk/ark:/81055/vdc_100045258293.0x000001
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Unknown (2012) Fundamentals of microfabrication and nanotechnology.. [Online]. Boca Raton, FL : CRC Press. Available from: http://access.bl.uk/ark:/81055/vdc_100045258293.0x000001