Fundamentals of microfabrication and nanotechnology. Manufacturing techniques for microfabrication and nanotechnology / Volume II, (©2012)

• Record Type: Book
• Other Titles: Manufacturing techniques for microfabrication and nanotechnology
• Further Information: Note: Marc J. Madou.
• Other Names: Madou, Marc J
• Contents: Photolithography -- Next-generation lithographies and lithography research -- Dry etching -- Wet chemical etching and wet bult micromachining : pools as tools -- Thermal energy-based removing -- Mechanical energy-based removing -- Physical and chemical vapor deposition : thin film properties and surface micromachining -- Chemical, photochemical, and electrochemical forming techniques -- Thermal energy-based forming techniques : thermoforming -- Micromolding techniques : LIGA.
• Edition: Third edition
• Publisher Details: Boca Raton, FL : CRC Press
• Publication Date: 2012
• Copyright Date: 2012
• Extent: 1 online resource (xiii, 656 pages), illustrations (some color)
• Subjects: 620/.5; Microfabrication; Nanotechnology; TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS; TECHNOLOGY & ENGINEERING -- Manufacturing; TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics; Microfabrication; Nanotechnology
• Languages: English
• ISBNs: 9781439895306; 1439895309
• Related ISBNs: 9781420055191; 1420055194
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.