Integrated nanodevice and nanosystem fabrication : breakthroughs and alternatives /: breakthroughs and alternatives. (2017)

Record Type:: Book
Title:: Integrated nanodevice and nanosystem fabrication : breakthroughs and alternatives /: breakthroughs and alternatives. (2017)
Main Title:: Integrated nanodevice and nanosystem fabrication : breakthroughs and alternatives
Further Information:: Note: Edited by Simon Deleonibus.
Editors:: Deleonibus, Simon
Edition:: 1st
Publisher Details:: Singapore : Pan Stanford Publishing
Publication Date:: 2017
Extent:: 1 online resource
Subjects:: 621.395
Nanoelectronics
Integrated circuits
Nanoscience
Metal oxide semiconductors, Complementary
Silicon -- Electric properties
Languages:: English
ISBNs:: 9781351721776
9781351721783
9781351721769
Related ISBNs:: 9789814774222
Notes:: Note: Description based on CIP data; resource not viewed.
Access Rights:: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library HMNTS - ELD.DS.231009
Ingest File:: 02_269.xml