III-V integrated circuit fabrication technology. (2016)

• Record Type: Book
• Further Information: Note: Edited by Shiban Tiku, Dhrubes Biswas.
• Editors: Tiku, Shiban; Biswas, Dhrubes
• Contents: Semiconductor fundamentals. GaAs devices. Phase diagrams and crystal growth. Epitaxy. Photolithography. Wet etching. Cleaning and passivation. Plasma processing and dry etching. Deposition. Ion implantation and device isolation. Diffusion. Ohmic contacts. Schottky diodes and FET processing. HEMT process. HBT processing. BiFET and BiHEMT processing. MOSFET processing. Passive components. Interconnect technology. Backside processing and wafer bumping. Electroplating. Measurements and characterization. Reliability. GaN devices and R F MEMs.
• Edition: 1st
• Publisher Details: Singapore : Pan Stanford Publishing
• Publication Date: 2016
• Extent: 1 online resource
• Subjects: 621.3815; Compound semiconductors; Integrated circuits
• Languages: English
• ISBNs: 9789814669313
• Related ISBNs: 9789814669306
• Notes: Note: Description based on CIP data; item not viewed.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.