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Subject atomic layer deposition -- magnetoelectrics -- zirconium oxide

1. Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone. (1st January 2018)

Authors:
Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku
Journal:
ECS journal of solid state science and technology
Issue:
Volume 7:Number 2(2018)
Page Start:
P1
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

2. Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone. (3rd January 2018)

Authors:
Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku
Journal:
ECS journal of solid state science and technology
Issue:
Volume 7:Number 2(2018)
Page Start:
P1
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

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