1. Dry etching technology for semiconductors. ([2014]) Authors: Nojiri, Kazuo Record Type: Book Extent: 1 online resource (xiii, 116 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Nanofabrication : principles to laboratory practice /: principles to laboratory practice. (2016) Authors: Sarangan, Andrew Record Type: Book Extent: 1 online resource (315 pages), (22 illustrations) View Content: Available online (eLD content is only available in our Reading Rooms) ↗