1. Synchronizing Decentralized Control Loops for Overall Performance Enhancement: A Youla Framework Applied to a Wafer Scanner. Issue 1 (July 2017) Authors: Evers, Enzo; van de Wal, Marc; Oomen, Tom Journal: IFAC-PapersOnLine Issue: Volume 50:Issue 1(2017) Page Start: 10845 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗