1. A review: aluminum nitride MEMS contour-mode resonator*Project supported by National Natural Science Foundation (Nos. 61274001, 61234007, 61504130), the Nurturing and Development Special Projects of Beijing Science and Technology Innovation Base's Financial Support (No. Z131103002813070), and the National Defense Science and Technology Innovation Fund of CAS (No. CXJJ-14-M32). (October 2016) Authors: Hou 侯, Yunhong 云虹; Zhang 张, Meng 萌; Han 韩, Guowei 国威; Si 司, Chaowei 朝伟; Zhao 赵, Yongmei 咏梅; Ning 宁, Jin 瑾 Journal: Journal of semiconductors Issue: Volume 37:Number 10(2016:Oct.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. A review: crystalline silicon membranes over sealed cavities for pressure sensors by using silicon migration technology *Project supported by the National Major Science & Technology Program of China (No. 2011ZX02507-001). (July 2018) Authors: Su, Jiale; Zhang, Xinwei; Zhou, Guoping; Xia, Changfeng; Zhou, Wuqing; Huang, Qing'an Journal: Journal of semiconductors Issue: Volume 39:Number 7(2018:Jul.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗