1. BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices. Part 42. Measurement methods of electromechanical conversion characteristics of piezoelectric MEMS cantilever (9th July 2021) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (22 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗