BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices. Part 42. Measurement methods of electromechanical conversion characteristics of piezoelectric MEMS cantilever (9th July 2021)

Record Type:: Book
Title:: BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices. Part 42. Measurement methods of electromechanical conversion characteristics of piezoelectric MEMS cantilever (9th July 2021)
Main Title:: BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices.
Authors:: British Standards Institution,
Publisher Details:: London : British Standards Institution
Publication Date:: 2021
Extent:: 1 online resource (22 pages)
Subjects:: 602.1841
Semiconductor technology
Electronic equipment and components
Semiconductor devices
Semiconductors
Semiconductor diodes
Semiconductor rectifiers
Semiconductor resistors
Languages:: English
ISSNs:: 3043-2242
Access Rights:: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library HMNTS - ELD.DS.618838
Ingest File:: 05_021.xml