1. Toward inertial-navigation-on-chip : the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes /: the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes. (2019) Other Names: Wen, Haoran Record Type: Book Extent: 1 online resource (134 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗