Toward inertial-navigation-on-chip : the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes /: the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes. (2019)
- Record Type:
- Book
- Title:
- Toward inertial-navigation-on-chip : the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes /: the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes. (2019)
- Main Title:
- Toward inertial-navigation-on-chip : the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes
- Further Information:
- Note: Haoran Wen.
- Other Names:
- Wen, Haoran
- Contents:
- Intro; Supervisorś Foreword; Acknowledgments; Contents; Parts of this thesis have been published in the following articles:; Chapter 1: Introduction; 1.1 Inertial Navigation System; 1.2 Evolution of Gyroscopes; 1.3 Evolution of MEMS Gyroscopes; References; Chapter 2: The Physics of Resonant MEMS Gyroscopes; 2.1 Principle of Operation; 2.2 Non-ideal MEMS Gyroscope; 2.2.1 Mechanical Model; 2.2.1.1 Mode-Matching; 2.2.1.2 Sense Output Bias; 2.2.2 Electromechanical Transduction and Interface Circuits; 2.2.3 Drive-Loop Transduction and Control; 2.2.4 Sense-Mode Detection 2.2.5 Electrostatic Tuning2.2.5.1 Stiffness Mismatch Tuning; 2.2.5.2 Quadrature Cancellation; 2.2.6 Electrical Noise and Errors; 2.3 Performance Parameters; 2.3.1 Scale-Factor and Bandwidth; 2.3.2 Angle Random Walk; 2.3.3 Bias Instability and Long-Term Drift; References; Chapter 3: Bias Control in Pitch and Roll Gyroscopes; 3.1 Quadrature Cancellation; 3.1.1 Slanted Electrode; 3.1.2 Fabrication Implementation; 3.2 KOH-Etched Quad-Mass Gyroscope; 3.2.1 Design of Wet-Etched-Only Gyroscope; 3.2.2 Simulation Results; 3.2.3 Fabrication Process; 3.2.4 Experimental Characterization 3.2.4.1 Mode-Matching Behavior3.2.4.2 Gyroscope Performance Characterization; 3.3 Dissipation and In-Phase Bias Stabilization; 3.4 Robust Substrate-Decoupled Pitch or Roll Gyroscope; 3.4.1 Slanted Electrode in DRIE-Based Devices; 3.4.2 High-Frequency Annulus Gyroscope with Slanted Electrodes; 3.4.3 Experimental Characterization; 3.4.3.1Intro; Supervisorś Foreword; Acknowledgments; Contents; Parts of this thesis have been published in the following articles:; Chapter 1: Introduction; 1.1 Inertial Navigation System; 1.2 Evolution of Gyroscopes; 1.3 Evolution of MEMS Gyroscopes; References; Chapter 2: The Physics of Resonant MEMS Gyroscopes; 2.1 Principle of Operation; 2.2 Non-ideal MEMS Gyroscope; 2.2.1 Mechanical Model; 2.2.1.1 Mode-Matching; 2.2.1.2 Sense Output Bias; 2.2.2 Electromechanical Transduction and Interface Circuits; 2.2.3 Drive-Loop Transduction and Control; 2.2.4 Sense-Mode Detection 2.2.5 Electrostatic Tuning2.2.5.1 Stiffness Mismatch Tuning; 2.2.5.2 Quadrature Cancellation; 2.2.6 Electrical Noise and Errors; 2.3 Performance Parameters; 2.3.1 Scale-Factor and Bandwidth; 2.3.2 Angle Random Walk; 2.3.3 Bias Instability and Long-Term Drift; References; Chapter 3: Bias Control in Pitch and Roll Gyroscopes; 3.1 Quadrature Cancellation; 3.1.1 Slanted Electrode; 3.1.2 Fabrication Implementation; 3.2 KOH-Etched Quad-Mass Gyroscope; 3.2.1 Design of Wet-Etched-Only Gyroscope; 3.2.2 Simulation Results; 3.2.3 Fabrication Process; 3.2.4 Experimental Characterization 3.2.4.1 Mode-Matching Behavior3.2.4.2 Gyroscope Performance Characterization; 3.3 Dissipation and In-Phase Bias Stabilization; 3.4 Robust Substrate-Decoupled Pitch or Roll Gyroscope; 3.4.1 Slanted Electrode in DRIE-Based Devices; 3.4.2 High-Frequency Annulus Gyroscope with Slanted Electrodes; 3.4.3 Experimental Characterization; 3.4.3.1 Resonant Behavior; 3.4.3.2 Gyroscope Characterization; References; Chapter 4: Scale-Factor Enhancement; 4.1 Transduction Linearity and Actuation Range; 4.1.1 Nano-gap Comb-Drive Design; 4.1.2 Testing Resonator Design; 4.1.3 Experimental Characterization 4.2 Coriolis Sensitivity4.2.1 Mode-Shape Optimization; 4.2.2 Resonant Framed-Annulus Pitch or Roll Gyroscope; 4.2.3 Experimental Characterization; 4.2.3.1 Resonant Behavior; 4.2.3.2 Gyroscope Response; 4.2.3.3 Temperature Behavior; References; Chapter 5: Integrated Inertial Measurement Unit; 5.1 Quasi-Solid Disk Yaw Gyroscope; 5.2 Timing and Inertial Measurement Unit; 5.2.1 3-Axis Gyroscopes; 5.2.2 3-Axis Accelerometers; 5.2.3 Timing Resonator; 5.2.4 Experimental Characterization; 5.2.4.1 Gyroscope Characterization; 5.2.4.2 Accelerometer Characterization; 5.2.4.3 Resonator Characterization 5.2.4.4 SummaryReferences; Chapter 6: Bias Stability Limit in Resonant Gyroscopes; 6.1 Electronics and Instrument Limit; 6.2 Demodulation Phase Error; 6.3 Performance of Pitch or Roll Gyroscopes; 6.3.1 Performance Scaling Comparison; 6.3.2 Nonlinear Tuning Effect; Chapter 7: Conclusions and Future Work; 7.1 Contributions; 7.2 Future Work; 7.2.1 Low-Power Resonant Gyroscopes; 7.2.2 Performance Enhancement in High-Frequency Resonant Gyroscopes; 7.2.2.1 Chip-Level Ovenization; 7.2.2.2 System Optimization and ASIC Implementation; 7.2.2.3 Quality-Factor Optimization; References … (more)
- Publisher Details:
- Cham : Springer
- Publication Date:
- 2019
- Extent:
- 1 online resource (134 pages)
- Subjects:
- 621.381
Inertial navigation
Microelectromechanical systems
Gyroscopes
Gyroscopes
Inertial navigation
Microelectromechanical systems
Electronic books - Languages:
- English
- ISBNs:
- 9783030254704
3030254704 - Notes:
- Note: Includes bibliographical references.
Note: Online resource; title from PDF title page (SpringerLink, viewed September 25, 2019). - Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
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- British Library HMNTS - ELD.DS.457075
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