1. Electrochemical microsystem technologies. (2002) Other Names: Schultze, J. W (Joachim Walter); Ōsaka, Tetsuya, 1945-; Datta, Madhav Record Type: Book Extent: 1 online resource (xviii, 569 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Fundamentals of microfabrication : the science of miniaturization /: the science of miniaturization. (2002) Other Names: Madou, Marc J Record Type: Book Extent: 1 online resource (723 pages, [18] pages of plates), illustrations (some color) View Content: Available online (eLD content is only available in our Reading Rooms) ↗