Fundamentals of microfabrication : the science of miniaturization /: the science of miniaturization. (2002)

• Record Type: Book
• Further Information: Note: Marc J. Madou.
• Other Names: Madou, Marc J
• Contents: Ch. 1. Lithography -- ch. 2. Pattern transfer with dry etching techniques -- ch. 3. Pattern transfer with additive techniques -- ch. 4. Wet bulk micromachining -- ch. 5. Surface micromachining -- ch. 6. LIGA and micromolding -- ch. 7. A comparison of miniaturization techniques : top-down and bottom-up manufacturing -- ch. 8. Modeling, brains, packaging, sample preparation, and substrate choice -- ch. 9. Scaling, actuators, and power in miniaturized systems -- ch. 10. Miniaturization applications.
• Edition: 2nd ed
• Publisher Details: Boca Raton : CRC Press
• Publication Date: 2002
• Extent: 1 online resource (723 pages, [18] pages of plates), illustrations (some color)
• Subjects: 621.38152 M183; Microelectronics; Integrated circuits -- Design and construction; Microelectromechanical systems -- Design and construction; Machining; Microelectronic packaging; Lasers -- Industrial applications; Integrated circuits -- Design and construction; Lasers -- Industrial applications; Machining; Microelectromechanical systems -- Design and construction; Microelectronic packaging; Microelectronics; Electronic books
• Languages: English
• ISBNs: 9781315274225; 1315274221; 9781482274004; 1482274000
• Related ISBNs: 0849308267; 9780849308260
• Notes: Note: Includes bibliographical references and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.