Author/Creator: van de Wal, Marc - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator van de Wal, Marc

1. Beyond decentralized wafer/reticle stage control design: A double-Youla approach for enhancing synchronized motion. (February 2019)

Authors:: Evers, Enzo; van de Wal, Marc; Oomen, Tom
Journal:: Control engineering practice
Issue:: Volume 83(2019)
Page Start:: 21
Record Type:: Journal Article
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2. Non-diagonal H∞ weighting function design: Exploiting spatio-temporal deformations in precision motion control. (February 2015)

Authors:: Boeren, Frank; van Herpen, Robbert; Oomen, Tom; van de Wal, Marc; Steinbuch, Maarten
Journal:: Control engineering practice
Issue:: Volume 35(2015)
Page Start:: 35
Record Type:: Journal Article
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3. Synchronizing Decentralized Control Loops for Overall Performance Enhancement: A Youla Framework Applied to a Wafer Scanner. Issue 1 (July 2017)

Authors:: Evers, Enzo; van de Wal, Marc; Oomen, Tom
Journal:: IFAC-PapersOnLine
Issue:: Volume 50:Issue 1(2017)
Page Start:: 10845
Record Type:: Journal Article
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