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You searched for: Author/Creator de Marneffe, J-F- de Marneffe, J-F [remove] 5
- 530.44 3
- Plasma (Ionized gases) -- Periodicals 3
- 530 2
- Physics -- Periodicals 2
- VUV -- low-k -- CF3I -- CF4 -- etching -- plasma-induced damage 1
- VUV -- low-k -- SiCOH -- CF3I -- CF4 -- plasma induced damage 1
- kinetics of CF3I-containing plasma -- fluorocarbon plasma -- optical emission spectroscopy -- ULK damage 1
- low-k materials -- cryogenic etching -- equivalent damage layer -- plasma -- mass spectrometry -- FTIR 1
- wafer probe -- in-situ diagnostics -- low-k dielectrics -- plasma induced damage 1