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You searched for: Author/Creator Zhao, Junyuan- Zhao, Junyuan [remove] 3
- 621.38105 3
- Microelectromechanical systems -- Periodicals 3
- Micromechanics -- Periodicals 3
- Akhiezer damping -- loss mechanisms -- MEMS resonators -- quality factor -- whispering gallery mode 1
- MEMS probe -- thermal-electrical actuation -- piezo-resistance -- micro-nano structure 1
- microcantilever biosensor -- alternating current electrothermal -- detection limit -- detection time -- sensitivity 1