1. Growth chemistry of cobalt nitride by plasma enhanced atomic layer deposition. (1st October 2022) Authors: O'Donnell, S; Snelgrove, M; Shiel, K; Weiland, C; Hughes, G; Woicik, J; O'Neill, D; Jose, F; McFeely, C; O'Connor, R Journal: Materials research express Issue: Volume 9:Number 10(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗