1. 3A New High Selectivity Acidic Slurry for Chemical Mechanical Planarizationof Carbon-Doped Ge2Sb2Te5 Film. (2nd September 2020) Authors: Feng, Daohuan; Wang, Weilei; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 9:Number 7(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. A New High Selectivity Acidic Slurry for Chemical Mechanical Planarization of Carbon-Doped Ge2Sb2Te5 Film. (2nd September 2020) Authors: Feng, Daohuan; Wang, Weilei; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 9:Number 7(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Chemical Mechanical Planarization of Carbon-Doped Amorphous Ge2Sb2Te5 Film with Hydrogen Peroxide as Oxidizer in Alkaline Slurry. (21st January 2020) Authors: Feng, Daohuan; Liu, Weili; Liu, Yuxiang; Song, Zhitang; Wang, Weilei; Wei, Zhen; Zhao, Gaoyang Journal: ECS journal of solid state science and technology Issue: Volume 9:Number 2(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Effect of Diethanolamine as Corrosion Inhibitor for the Chemical Mechanical Polishing of Cobalt in H2O2 Based Slurry. (23rd April 2021) Authors: Xu, Aoxue; Xu, Fan; Wang, Weilei; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 10:Number 4(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Effect of Ferric Nitrate on Semi-Insulating 4H-SiC (0001) Chemical Mechanical Polishing. (1st November 2022) Authors: Wang, Weilei; Liu, Weili; Song, Zhitang; Xu, Yonghui Journal: ECS journal of solid state science and technology Issue: Volume 11:Number 11(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Effect of Neotame and pH on LiTaO3 Chemical Mechanical Polishing. (1st April 2022) Authors: Wang, Weilei; Xu, Qiufeng; Xu, Fan; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 11:Number 4(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Effect of Particle Size and pH Value of Slurry on Chemical Mechanical Polishing of SiO2 Film. (18th January 2022) Authors: Xu, Fan; Wang, Weilei; Xu, Aoxue; Feng, Daohuan; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 11:Number 1(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Effect of Particle Size and pH Value of Slurry on Chemical Mechanical Polishing of SiO2 Film. (1st January 2022) Authors: Xu, Fan; Wang, Weilei; Xu, Aoxue; Feng, Daohuan; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 11:Number 1(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Effect of Particle Size Distribution, pH, and Na+ Concentration on the Chemical Mechanical Polishing of Sapphire and 4H-SiC (0001). (1st April 2022) Authors: Wang, Weilei; Xu, Qiufeng; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 11:Number 4(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. High Removal Rate Cobalt Slurry with Glutathione on Chemical Mechanical Polishing in Alkaline Slurry. (10th September 2020) Authors: Xu, Aoxue; Feng, Daohuan; Wang, Weilei; Liu, Weili; Song, Zhitang Journal: ECS journal of solid state science and technology Issue: Volume 9:Number 8(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗