1. Orbitrap™-SIMS analysis of advanced semiconductor inorganic structures. (August 2022) Authors: Franquet, A.; Spampinato, V.; Kayser, S.; Vandervorst, W.; van der Heide, P. Journal: Vacuum Issue: Volume 202(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗