1. Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering. (November 2016) Authors: Musil, J.; Javdošňák, D.; Čerstvý, R.; Haviar, S.; Remnev, G.; Uglov, V. Journal: Vacuum Issue: Volume 133(2016) Page Start: 43 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗