1. High performance a‐IGZO thin‐film transistors with mf‐PVD SiO2 as an etch‐stop‐layer. Issue 1 (16th April 2014) Authors: Nag, Manoj; Steudel, Soeren; Bhoolokam, Ajay; Chasin, Adrian; Rockele, Maarten; Myny, Kris; Maas, Joris; Fritz, Thomas; Trube, Jutta; Groeseneken, Guido; Heremans, Paul Journal: Journal of the Society for Information Display Issue: Volume 22:Issue 1(2014:Jan.) Page Start: 23 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗