1. Atomic layer deposition of AlN on different SiC surfaces. Issue 1 (1st March 2022) Authors: Beshkova, M; Deminskyi, P; Hsu, C-W; Shtepliuk, I; Avramova, I; Yakimova, R; Pedersen, H Journal: Journal of physics Issue: Volume 2240:Issue 1(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗