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You searched for: Author/Creator Schmid, ULimit your search
- Schmid, U [remove] 13
- 621.38105 9
- Microelectromechanical systems -- Periodicals 9
- Micromechanics -- Periodicals 9
- 621.38152 2
- Semiconductors -- Periodicals 2
- microresonators -- piezoelectric -- density -- viscosity -- rheology -- AlN -- lubricant oil 2
- 530 1
- 620.11 1
- MEMS -- mass sensor -- microcantilever -- mass responsivity -- resonance frequency 1
- MEMS -- piezoelectric -- cantilever resonator -- cantilever resonator -- FEM -- fluid-structure interaction 1