1. AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance. (8th June 2016) Authors: Wang, W B; Fu, Y Q; Chen, J J; Xuan, W P; Chen, J K; Wang, X Z; Mayrhofer, P; Duan, P F; Bittner, A; Schmid, U; Luo, J K Journal: Journal of micromechanics and microengineering Issue: Volume 26:Number 7(2016:Jul.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes. (20th April 2021) Authors: Triendl, F; Pfusterschmied, G; Schwarz, S; Pobegen, G; Konrath, J P; Schmid, U Journal: Semiconductor science and technology Issue: Volume 36:Number 5(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin films. (15th June 2018) Authors: Fischeneder, M; Bittner, A; Schneider, M; Schmid, U Journal: Materials research express Issue: Volume 5:Number 6(2018) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Impact of sputter deposition parameters on molybdenum nitride thin film properties. (22nd May 2015) Authors: Stöber, L; Konrath, J P; Krivec, S; Patocka, F; Schwarz, S; Bittner, A; Schneider, M; Schmid, U Journal: Journal of micromechanics and microengineering Issue: Volume 25:Number 7(2015:Jul.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface. (17th September 2015) Authors: Schneider, M; Bittner, A; Schmid, U Journal: Journal of physics Issue: Volume 48:Number 40(2015) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Modelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid media. (22nd July 2016) Authors: Ruiz-Díez, V; Hernando-García, J; Toledo, J; Manzaneque, T; Kucera, M; Pfusterschmied, G; Schmid, U; Sánchez-Rojas, J L Journal: Journal of micromechanics and microengineering Issue: Volume 26:Number 8(2016:Aug.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Modelling out-of-plane and in-plane resonant modes of microplates in liquid media. (8th June 2015) Authors: Ruiz-Díez, V; Hernando-García, J; Manzaneque, T; Kucera, M; Schmid, U; Sánchez-Rojas, J L Journal: Journal of micromechanics and microengineering Issue: Volume 25:Number 7(2015:Jul.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Piezoelectric resonators and an oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids. (22nd July 2016) Authors: Toledo, J; Manzaneque, T; Ruiz-Díez, V; Kucera, M; Pfusterschmied, G; Wistrela, E; Schmid, U; Sánchez-Rojas, J L Journal: Journal of micromechanics and microengineering Issue: Volume 26:Number 8(2016:Aug.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids. (22nd July 2016) Authors: Toledo, J; Manzaneque, T; Ruiz-Díez, V; Kucera, M; Pfusterschmied, G; Wistrela, E; Schmid, U; Sánchez-Rojas, J L Journal: Journal of micromechanics and microengineering Issue: Volume 26:Number 8(2016:Aug.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode. (28th February 2019) Authors: Patocka, F; Schneider, M; Dörr, N; Schneidhofer, C; Schmid, U Journal: Journal of micromechanics and microengineering Issue: Volume 29:Number 4(2019:Apr.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗