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Author/Creator Scheen, Gilles

2. Structural and nanomechanical properties of porous silicon: Cheap substrate for CMOS process industry. (4th October 2020)

Authors:
Belaroussi, Yasmina; Scheen, Gilles; Saadi, Abdelhalim A.; Taibi, Abdelkader; Maafri, Djabar; Nysten, Bernard; Gabouze, Noureddine; Raskin, Jean‐Pierre
Other Names:
Oswald Steffen guestEditor.; Watts John F. guestEditor.; Abel Marie‐Laure guestEditor.
Journal:
Surface and interface analysis
Issue:
Volume 52:Number 12(2020)
Page Start:
1055
Record Type:
Journal Article
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