1. Surface passivation for ultrathin Al2O3 layers grown at low temperature by thermal atomic layer deposition. Issue 4 (28th November 2012) Authors: Frascaroli, J.; Seguini, G.; Cianci, E.; Saynova, D.; van Roosmalen, J.; Perego, M. Journal: Physica status solidi Issue: Volume 210:Issue 4(2013:Apr.) Page Start: 732 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗